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» All Products  » Fluid Control Equipment  · High Purity Products
Valves & Manifolds 
LVD 

New
  • High purity air or manually operated compact valve.
  • Applicable fluid: chemical liquid.
  • High flow rates, up to 114 l/min.
  • Fittings or tube extensions integrated in the valve.
  • Pilot port can be selected from 4 directions.
  • Options: with flow rate adjustment, bypass, indicator, high back pressure (0.5 MPa).
  • High purity air or manually operated compact valve.
  • Applicable fluid: chemical liquid.
  • High flow rates, up to 114 l/min.
  • Fitting... Learn more
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LVA 

SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.
SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm cons... Learn more
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LVC 

High purity chemical valves, series LVC with integral fittings eliminate the possibility of residual liquid in pipe threads. In addition, the body has been designed for smooth flow with minimal internal dead space. Special diaphragm construction insures gentle opening and closing preventing the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.
High purity chemical valves, series LVC with integral fittings eliminate the possibility of residual liquid in pipe threads. In addition, the body has been des... Learn more
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LVQ 

Series LVQ is a 2 port chemical valve with a non-metallic exterior. A high density PVDF housing offers increased chemical resistance and the special diaphragm construction insures gentle opening and closing preventing the formation of micro-bubbles. The LVQ guide ring eliminates lateral motion of the poppet, which reduces internal leakage.
Series LVQ is a 2 port chemical valve with a non-metallic exterior. A high density PVDF housing offers increased chemical resistance and the special diaphragm ... Learn more
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LVH 

LVH series air operated high purity valves are corrosion resistant against acid, alkali and ultra pure water, making the LVH valve the perfect answer to overcome the harsh environments often encountered in wet process applications. Series LVH is a manually operated valve, available in a threaded or integral fitting type.
LVH series air operated high purity valves are corrosion resistant against acid, alkali and ultra pure water, making the LVH valve the perfect answer to overcom... Learn more
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LVN 

An complaint often heard in both semiconductor and chemical equipment industries, is that it's almost impossible to eliminate bubble formation in the fluid circuit during the manufacturing process. Following extensive research and development, engineers from SMC, the worlds leading automation control experts, are pleased to announce that this is no longer the case with the introduction of their latest chemical needle valves ? Series LVN.Developed especially to overcome bubble generation when using light liquids, LVN valves are manufactured from a new type of lightweight PFA material which is highly compatible with acids, bases and ultra pure water. Normally installed on top of the filter unit, these needle valves can regulate flow rates between 0 to 12 l/min and when used in conjunction with SMC's LQ2 hyper PFA fittings, with their unique quadruple seal construction, outstanding performance is achieved providing minimal leakage, reduced residual fluid and high flexural strength.Series LVN valves are the perfect answer when working with fluids between 5 ? 90º C, at operating pressures of 0 ? 0 ,5 MPa and in ambient temperatures of 0 ? 60º C - a champagne solution minus the bubbles.
An complaint often heard in both semiconductor and chemical equipment industries, is that it's almost impossible to eliminate bubble formation in the fluid circ... Learn more
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LVP 

If you need a 2 port air operated valve for use with aggressive fluids then look no further than our new Series LVP. Developed specifically for use with deionized water and harsh chemicals such as hydrochloric acid and hydrogen peroxide, our R&D engineers have designed this multi-purpose valve with a vinyl chloride (CPVC) body and a PTFE diaphragm. Suitable for use in many industrial applications including clean in place (CIP) systems, electro plating and metal finishing, water treatment and PCB manufacturing, Series LVP offers further performance benefits including simple flow rate adjustment and dramatically reduced low water hammer ? 50% lower than conventional fluid valves. With the possibility of piping from four directions and a PVC unfixed union to accommodate a rigid vinyl chloride tube, these new LVP valves deliver impressive operational performance when working with a large range of aggressive or corrosive fluids.
If you need a 2 port air operated valve for use with aggressive fluids then look no further than our new Series LVP. Developed specifically for use with deioniz... Learn more
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Regulators 
SRF 

The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water.
The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact are... Learn more
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Fittings 
LQ1 

SMC high purity HYPER FITTING series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed duing process, our face seal design allows for quick change of tubing, and/or tube diameters, using the same fitting body.
SMC high purity HYPER FITTING series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are c... Learn more
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LQ2 

SMC high purity HYPER FITTING series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed duing process, our face seal design allows for quick change of tubing, and/or tube diameters, using the same fitting body.
SMC high purity HYPER FITTING series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are c... Learn more
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LQ3 

SMC high purity HYPER FITTING series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed duing process, our face seal design allows for quick change of tubing, and/or tube diameters, using the same fitting body.
SMC high purity HYPER FITTING series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are c... Learn more
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LQHB 

To complement the LQ1 range, we have also developed a new fluoropolymer fitting, where the tube runs through the fitting itself, which enable bore through connections when you need to penetrate through a panel or wall - Series LQHB.
To complement the LQ1 range, we have also developed a new fluoropolymer fitting, where the tube runs through the fitting itself, which enable bore through conne... Learn more
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Tubing 
TH 

New
Fluoropolymer tubing series TH is available in 4 color variations (translucent, black, red, blue) and 8 size variations. Applicable fittings include high purity fluoropolymer fittings series LQ, One-touch fittings series KQ2, KJ, miniature fittings series M, MS and insert fittings series KF. Applicable applications include food, medical care, semiconductor, automobile and general pneumatic piping.
Fluoropolymer tubing series TH is available in 4 color variations (translucent, black, red, blue) and 8 size variations. Applicable fittings include high pur... Learn more
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TL 

Series TL high purity fluoropolymer tubing is available as standard in metric sizes of 10m or 20m rolls. The TL series has outstanding corrosion resistance, compatible with chemicals such as acids, bases and ultrapure water.
Series TL high purity fluoropolymer tubing is available as standard in metric sizes of 10m or 20m rolls. The TL series has outstanding corrosion resistance, ... Learn more
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TIL 

Series TIL high purity fluoropolymer tubing is available as standard in inch sizes of 50' and 100' rolls. The TIL series has outstanding corrosion resistance, compatible with chemicals such as acids, bases and ultrapure water. The TIL series is also compatible with maximum fluid temperatures of up to 200°C.
Series TIL high purity fluoropolymer tubing is available as standard in inch sizes of 50' and 100' rolls. The TIL series has outstanding corrosion resistance... Learn more
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TLM 

We are pleased to unveil a new advanced flexible, heat and chemical resistant tubing that is chemically compatible with a wide range of fluids and can resist temperatures up to 260°C. The TLM features improved PFA material, which allows use in applications requiring chemical resistance and can withstand fluids that need to be conducted at very high temperatures. It also comes in four different colours ? red, black, blue and translucent ? so customers can set differently coloured tubes in a visual way to help ease the maintenance and calibration works process, which is required periodically. What is more, we have extended the size and length variations so customers can select exactly what they need in 13 metric and 9 inch options. It can also be ordered in seven different lengths from 2 metres straight up to 100 metre rolls. Developed to be combined with our extensive specific Fittings Series, the addition of the TLM tube provides customers with a complete solution for their piping equipment needs in one single step.
We are pleased to unveil a new advanced flexible, heat and chemical resistant tubing that is chemically compatible with a wide range of fluids and can resist te... Learn more
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TILM 

We are pleased to unveil a new advanced flexible, heat and chemical resistant tubing that is chemically compatible with a wide range of fluids and can resist temperatures up to 260°C. The TLM features improved PFA material, which allows use in applications requiring chemical resistance and can withstand fluids that need to be conducted at very high temperatures. It also comes in four different colours ? red, black, blue and translucent ? so customers can set differently coloured tubes in a visual way to help ease the maintenance and calibration works process, which is required periodically. What is more, we have extended the size and length variations so customers can select exactly what they need in 13 metric and 9 inch options. It can also be ordered in seven different lengths from 2 metres straight up to 100 metre rolls. Developed to be combined with our extensive specific Fittings Series, the addition of the TLM tube provides customers with a complete solution for their piping equipment needs in one single step.
We are pleased to unveil a new advanced flexible, heat and chemical resistant tubing that is chemically compatible with a wide range of fluids and can resist te... Learn more
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TD 

Machine builders requiring extra flexible, heat and chemical resistant tubing now have the answer with our new Series TD/TID tubing range. Developed specifically for use in restricted space applications, this soft multi-purpose fluoropolymer tubing achieves a 20% increase in flexibility when compared to our existing TL/TH tubing. Available in both metric and inch sizes of between 4 -12 mm and 1/8" ? 1/2" respectively, the tubing is made from denatured PTFE fluorine-based resin which provides high chemical and heat resistance up to + 260ºC. With Food Sanitation Approval (FDA), TD/TID is the perfect solution in Food and Packaging, Life Science, Semiconductor and Automotive industry applications.
Machine builders requiring extra flexible, heat and chemical resistant tubing now have the answer with our new Series TD/TID tubing range. Developed specificall... Learn more
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TID 

Machine builders requiring extra flexible, heat and chemical resistant tubing now have the answer with our new Series TD/TID tubing range. Developed specifically for use in restricted space applications, this soft multi-purpose fluoropolymer tubing achieves a 20% increase in flexibility when compared to our existing TL/TH tubing. Available in both metric and inch sizes of between 4 -12 mm and 1/8" ? 1/2" respectively, the tubing is made from denatured PTFE fluorine-based resin which provides high chemical and heat resistance up to + 260ºC. With Food Sanitation Approval (FDA), TD/TID is the perfect solution in Food and Packaging, Life Science, Semiconductor and Automotive industry applications.
Machine builders requiring extra flexible, heat and chemical resistant tubing now have the answer with our new Series TD/TID tubing range. Developed specificall... Learn more
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TIH 

Inch size, fluoropolymer tubing series TIH is available in 4 color variations (translucent, black, red, blue) and 11 size variations. Applicable fittings include high purity fluoropolymer fittings series LQ, and one-touch fittings series KQ2 and KJ. Applicable applications include food, medical care, semiconductor, automobile and general pneumatic piping.
Inch size, fluoropolymer tubing series TIH is available in 4 color variations (translucent, black, red, blue) and 11 size variations. Applicable fittings inc... Learn more
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