Valves & Manifolds

SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.

High purity chemical valves, series LVC with integral fittings eliminate the possibility of residual liquid in pipe threads. In addition, the body has been designed for smooth flow with minimal internal dead space. Special diaphragm construction insures gentle opening and closing preventing the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.

Following semiconductor industry requests for a range of high purity valves for wet process applications, engineers from SMC, the worlds leading automation experts, have reaped the benefits of their substantial R&D investment with the launch of their latest 2/3 port Series LVA, LVC and LVD valves.Designed specifically for both semi and medical applications, these air operated high purity valves are the perfect answer to overcome the harsh environments often encountered in wet process applications. Constructed from different materials, dependent on their performance needs, and with a wide range of body options, Series LVA, LVC and LVD with their resin fluid paths, are the perfect choice when working with acids, alkalis and ultra pure water.Series LVC features integral compression fittings and uses the latest PFA material for its body. Series LVA features threaded body fittings and uses a combination of body materials including SUS316, PPS and PFA with Series LVD using PFA body materials and SMC ´s one touch fittings - Series LQ1 and the clean Series KP . In the case of the LVC model one further feature is also available - a suck back valve to overcome and eliminate any possible leakage following the valves closure.With their unique design and construction, these valves have no measurable leakage when operated at normal working pressures and SMC´s development testing has indicated extremely long life cycle performance.

Series LVQ is a 2 port chemical valve with a non-metallic exterior. A high density PVDF housing offers increased chemical resistance and the special diaphragm construction insures gentle opening and closing preventing the formation of micro-bubbles. The LVQ guide ring eliminates lateral motion of the poppet, which reduces internal leakage.

LVH series air operated high purity valves are corrosion resistant against acid, alkali and ultra pure water, making the LVH valve the perfect answer to overcome the harsh environments often encountered in wet process applications. Series LVH is a manually operated valve, available in a threaded or integral fitting type.

An complaint often heard in both semiconductor and chemical equipment industries, is that it's almost impossible to eliminate bubble formation in the fluid circuit during the manufacturing process. Following extensive research and development, engineers from SMC, the worlds leading automation control experts, are pleased to announce that this is no longer the case with the introduction of their latest chemical needle valves – Series LVN.Developed especially to overcome bubble generation when using light liquids, LVN valves are manufactured from a new type of lightweight PFA material which is highly compatible with acids, bases and ultra pure water. Normally installed on top of the filter unit, these needle valves can regulate flow rates between 0 to 12 l/min and when used in conjunction with SMC's LQ2 hyper PFA fittings, with their unique quadruple seal construction, outstanding performance is achieved providing minimal leakage, reduced residual fluid and high flexural strength.Series LVN valves are the perfect answer when working with fluids between 5 – 90º C, at operating pressures of 0 – 0 ,5 MPa and in ambient temperatures of 0 – 60º C - a champagne solution minus the bubbles.

Series LVP, employs vinyl chloride CPVC for body material.  With its 2 ports, piping is possible in four directions.  Applicable fluids, deionized water and chemicals.