If it does, our high-quality peripheral equipment is precisely what you need to exhaust air from and supply atmospheric pressure to your vacuum chamber when processing wafers and LCDs.
SMC’s high vacuum solutions provide high performance while fulfilling the required conditions such as non-leakage, clean specifications, corrosion resistance, long service life and minimum maintenance time.
Our committed and expertly trained professionals are at your disposal to take care of your field solutions service and product needs in addition to SMC’s global coverage and manufacturing.
Explore our high vacuum products to define your perfect solution and meet the demands of your industry.
See examples below of applications where SMC's High Vacuum solutions have successfully adapted to our customers' needs:
Photolithographic and chemical processing to create integrated electronic circuits
Crystalline silicon cell and thin film manufacturing to create solar cells
Injection systems, airbag ignitors, fuel tanks, air suspension and air condition systems