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Ensure your system runs at its peak

High Vacuum solutions

Our High Vacuum solutions have evolved to meet the increasingly complex demands of semiconductor manufacturing and other high-tech industries.

Does your manufacturing process comprise any of the following?

  • Etching equipment
  • Sputtering equipment
  • Ion implantation equipment
  • CVD equipment.

If it does, our high-quality peripheral equipment is precisely what you need to exhaust air from and supply atmospheric pressure to your vacuum chamber when processing wafers and LCDs.

SMC’s high vacuum solutions provide high performance while fulfilling the required conditions such as non-leakage, clean specifications, corrosion resistance, long service life and minimum maintenance time.

Our committed and expertly trained professionals are at your disposal to take care of your field solutions service and product needs in addition to SMC’s global coverage and manufacturing.

Applications

High vacuum technology is critical in advanced research and industrial processes, including analytical instruments, coating systems, and space simulation chambers. SMC provides components that guarantee leak-tight performance, precise thermal regulation, and accurate pressure control—essential for environments where even the smallest deviation can impact results.Whether you’re developing next-generation materials or running high-precision experiments, SMC delivers solutions that keep your systems stable and reliable.

High Vacuum solutions in detail

Click in the picture bellow for more information.

N2 gas/Air supply line

To maintain chamber integrity and prevent contamination, clean nitrogen or air is introduced through controlled supply lines. These lines support valve actuation and chamber purging, ensuring stable pressure conditions during processing.

Exhaust line

Efficient evacuation of process gases is critical for maintaining high vacuum levels. Exhaust lines equipped with smooth vent and angle valves enable controlled pressure release, minimizing particle generation and ensuring rapid chamber recovery.

Slit valve and Transfer

Slit valves enable clean and precise wafer transfer between vacuum chambers, maintaining vacuum integrity during load-lock operations. Complementary components such as rodless cylinders and ionizers support smooth, particlefree motion and electrostatic discharge control, ensuring reliable and contamination-free handling throughout the transfer process.

Driving air operated valves

Air operated valves require a stable and clean pneumatic supply to function reliably in high vacuum systems. Components such as 4-position dual 3-port valves and clean regulators ensure precise actuation, supporting consistent valve performance while minimizing contamination risks.

Temperature adjustment line

Cooling water systems help dissipate heat generated during vacuum operations, safeguarding equipment and maintaining optimal chamber conditions. Filters and flow control valves ensure clean and stable water circulation, reducing the risk of contamination and thermal fluctuations. 


Contact an SMC Expert now and see how SMC High Vacuum solutions can ensure a peak performance for your system.