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Slit Valves

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XGTP
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XGTP

  • Parallel seal type slit valve for 300 mm wafer
  • Long service life of 3 million cycles
  • Particle generation reduced by 1/5 or more
  • Mechanical end lock mechanism
  • Bellows are easily replaceable and top accessible (made to order)
  • Interchangeable with the current XGT product.

XGT

XGT

Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.

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