Austria
Belgium - Dutch
Belgium - French
Bulgaria
Croatia
Czech Republic
Denmark
Estonia
Finland
France
Germany
Greece
Hungary
Ireland
Italy
Latvia
Lithuania
Netherlands
Norway
Poland
Portugal
Romania
Russia
Serbia
Slovakia
Slovenia
Spain
Sweden
Switzerland - French
Switzerland - German
Switzerland - Italian
Turkey
Ukraine
United Kingdom
To meet the demands of this fast-paced industry we have developed an extensive portfolio of cost effective, high quality, products that offer you some excellent solutions for a variety of applications including:
Scroll down the page for more information on some of these applications.
We recognise that in some cases our standard product range does not meet your needs. This is not a problem. With over 1,500 R&D engineers located in our 5 Technical Centres around the world we can develop customised solutions to solve your automation challenges.
Visit our online catalogue and discover our specific solutions for your industry
Surprise yourself with our effective solutions for handling, control & transfer applications
Semiconductor device fabrication is the process used to create the integrated circuits that are ever present in everyday electrical and electronic devices. It is a step by step sequence of photolithographic and chemical processing during which electronic circuits are gradually created on a wafer made of pure semiconducting material. Silicon is frequently used in the process, but various compound semiconductors are required for specialized applications.
High vacuum valves are in the exhaust pipe of the process chamber. In addition, ultra-pure gas valves are used to direct the gases into the process chamber.
XL Series
XM Series
XGT, XGD Series
In order to optimise the processes, the temperatures of the individual chambers (especially the process chamber) are precisely controlled. Process valves, flow switches, pressure regulators and pressure switches are used for this purpose.
VX2 Series
PF3W Series
SRH Series
ISE20C Series
Cooling and temperature control units are used to precisely control the different chambers.
HRSH Series
HRS Series
HRZ Series
HRW Series
HEC Series
HECR Series
Exhaust line: Transfer chamber & Load-lock chamber: High vacuum valves are located in the exhaust pipe of the transfer chamber.
XL Series
XM Series
XGT, XGD Series
Regulators, flow switches, filters and vent valves are used to smoothly ventilate the transfer chamber. This avoids turbulence, which could cause particles to swirl.
XVD Series
SRH Series
SRF Series
PFM Series
SF Series
Most semiconductor chips are laser marked, providing permanent, reliable and attractive markings in fractions of a second. Before packaging, silicon semiconductor wafers are identified using highly controlled lasers to avoid damaging the properties of the wafer.
In order to achieve optimal and consistent results, the temperature of the laser and optics are precisely controlled. Process valves, flow switches, pressure switches and regulators are used for accurate measurement and reading.
VX2 Series
SRH Series
PF3W Series
ISE20C Series
LFE Series
KKA Series
Thermo-chiller or thermo-con devices are used to precisely control the temperature of the laser and optics. See our range of chillers here:
HRSH Series
HRS Series
HRZ Series
HRW Series
HEC Series
HECR Series
