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SMC’s electric range and solutions are helping form the standards of tomorrow. In order to meet the demands of a rapidly growing marketplace, we created an extensive portfolio of solutions for a variety of applications that consist of:
Further below, you can look at our detailed description of these processes and functions.
Nevertheless, we understand our standard products and models may not always fulfil your needs, therefore we count on the expertise of SMC’s 5 technical centres around the world to assist in developing customised solutions in order to solve your automation challenges.
Visit our online product catalogue and discover our specific solutions for your industry
Dazzle yourself with our delicate and effective solutions for handling, control & transfer
Semiconductor device fabrication is the process used to create the integrated circuits that are ever present in everyday electrical and electronic devices. It is a step by step sequence of photolithographic and chemical processing during which electronic circuits are gradually created on a wafer made of pure semiconducting material. Silicon is frequently used in the process, but various compound semiconductors are required for specialized applications.
High vacuum valves are in the exhaust pipe of the process chamber. In addition, ultra-pure gas valves are used to direct the gases into the process chamber.
XL Series
XM Series
XGT, XGD Series
In order to optimise the processes, the temperatures of the individual chambers (especially the process chamber) are precisely controlled. Process valves, flow switches, pressure regulators and pressure switches are used for this purpose.
VX2 Series
PF3W Series
SRH Series
ISE20C Series
Cooling and temperature control units are used to precisely control the different chambers.
HRSH Series
HRS Series
HRZ Series
HRW Series
HEC Series
HECR Series
Exhaust line: Transfer chamber & Load-lock chamber: High vacuum valves are located in the exhaust pipe of the transfer chamber.
XL Series
XM Series
XGT, XGD Series
Regulators, flow switches, filters and vent valves are used to smoothly ventilate the transfer chamber. This avoids turbulence, which could cause particles to swirl.
XVD Series
SRH Series
SRF Series
PFM Series
SF Series
Most semiconductor chips are laser marked, providing permanent, reliable and attractive markings in fractions of a second. Before packaging, silicon semiconductor wafers are identified using highly controlled lasers to avoid damaging the properties of the wafer.
In order to achieve optimal and consistent results, the temperature of the laser and optics are precisely controlled. Process valves, flow switches, pressure switches and regulators are used for accurate measurement and reading.
VX2 Series
SRH Series
PF3W Series
ISE20C Series
LFE Series
KKA Series
Thermo-chiller or thermo-con devices are used to precisely control the temperature of the laser and optics. See our range of chillers here:
HRSH Series
HRS Series
HRZ Series
HRW Series
HEC Series
HECR Series
