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XL

XL

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

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Categorieën

XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed/Bellows Seal

XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed/Bellows Seal

  • Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
  • High corrosion resistance to fluorine gas
  • Minimal outgassing
  • Minimal contamination from heavy metals
  • Optional heaters
  • Optional position sensors
  • Optional oxalic acid anodizing for internals

XLAV-2, Aluminium High Vacuum Angle Valve, Normally Closed/Bellows Seal with Solenoid Valve

XLAV-2, Aluminium High Vacuum Angle Valve, Normally Closed/Bellows Seal with Solenoid Valve

  • Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
  • High corrosion resistance to fluorine gas
  • Minimal outgassing
  • Minimal contamination from heavy metals
  • Optional heaters
  • Optional position sensors
  • Optional oxalic acid anodizing for internals

XLF-2, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal

XLF-2, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal

  • Air pressure applied to pilot port shifts opens piston-coupled valve
  • Numerous maintenance parts available to extend useful life of valve
  • Standard FKM seals, plus 8 additional seal compound options
  • Auto switches mountable from 4-directions
  • Optional 100°C and 150°C heaters (UL compliant lead wire)

XLFV-2, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal with Solenoid Valve

XLFV-2, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal with Solenoid Valve

  • Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
  • High corrosion resistance to fluorine gas
  • Minimal outgassing
  • Minimal contamination from heavy metals
  • Optional heaters
  • Optional position sensors
  • Optional oxalic acid anodizing for internals

XLG-2, Aluminum High Vacuum Angle Valve, Double Acting, O-ring Seal

XLG-2, Aluminum High Vacuum Angle Valve, Double Acting, O-ring Seal

  • Air pressure applied to pilot port shifts piston-coupled valve
  • Numerous maintenance parts available to extend useful life of valve
  • Standard FKM seals, plus 8 additional seal compound options
  • Auto switches mountable from 4 directions
  • Optional 100°C and 150°C heaters (UL compliant lead wire)

XLC-2, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal

XLC-2, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal

  • Air pressure applied to pilot port shifts piston-coupled valve
  • Replaceable bellows reduces maintenance cost and waste material
  • Additional maintenance parts available to extend useful life of valve
  • Standard FKM seals, plus 8 additional seal compound options
  • Auto switches mountable from 4 directions
  • Optional 100°C and 150°C heaters (UL compliant lead wire)

XLA100/160-X152, Aluminium High Vacuum Angle Valve, Normally Closed, Bellows Seal

XLA100/160-X152, Aluminium High Vacuum Angle Valve, Normally Closed, Bellows Seal

  • Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
  • High corrosion resistance to fluorine gas
  • Minimal outgassing
  • Minimal contamination from heavy metals
  • Optional heaters
  • Optional position sensors
  • Optional oxalic acid anodizing for internals

XLC100/160-X152, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal

XLC100/160-X152, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal

  • Air pressure applied to pilot port shifts piston-coupled valve
  • Replaceable bellows reduces maintenance cost and waste material
  • Additional maintenance parts available to extend useful life of valve
  • Standard FKM seals, plus 8 additional seal compound options
  • Auto switches mountable from 4 directions
  • Optional 100°C and 150°C heaters (UL compliant lead wire)

XLJ, Vacuum Angle Valve w/Release Valve

XLJ, Vacuum Angle Valve w/Release Valve

  • Compatible with inert gases
  • Flange sizes: 25 and 40
  • Operating pressure range: Atmospheric to 0.01 Pa
  • Operating temperature: 5-40°C
  • Voltage options: (100, 110, 200, 220, 230, 240)VAC; (12, 24)VDC

XLH, High Vacuum Manual Angle Valve, Bellows Seal

XLH, High Vacuum Manual Angle Valve, Bellows Seal

  • High vacuum angle valve
  • Type: manual, bellows seal
  • Flange size: 16 ~ 50
  • Heater type: H1 (80°C), H2 (100°C), H3 (120°C)
  • Auto switches not available

XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance

XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance

  • Particulates are reduced because there are no sliding metal parts
  • Pressure balance mechanism allows unrestricted exhaust direction
  • Can be used in portable equipment since air for drive is not required
  • A control power supply circuit for solenoid valve drive has been made standard

XLAQ, Aluminum One-touch Connection and Release High Vacuum Angle Valve, Normally Closed, Bellows Seal

XLAQ, Aluminum One-touch Connection and Release High Vacuum Angle Valve, Normally Closed, Bellows Seal

  • “One-touch connection and release” mechanism for the bonnet assembly.
  • Compact and lightweight.
  • Large conductance and small body.
  • ”Know-how” required to prevent careless (dis)assembly.

XLDQ, Aluminum One-touch Connection and Release High Vacuum Angle, 2-step Control, Single Acting/Bellows Seal, O-ring Seal

XLDQ, Aluminum One-touch Connection and Release High Vacuum Angle, 2-step Control, Single Acting/Bellows Seal, O-ring Seal

  • “One-touch connection and release” mechanism for the bonnet assembly.
  • Compact and lightweight.
  • Large conductance and small body.
  • ”Know-how” required to prevent careless (dis)assembly.

XL*V, High Vacuum Angle Valves, Air Operated w/Solenoid Valve

XL*V, High Vacuum Angle Valves, Air Operated w/Solenoid Valve

  • Light weight and compact
  • Uniform baking temperature
  • High fluorine resistance
  • Low outgassing
  • Little heavy metal contamination

XL*, High Vacuum Angle Valve, Air Operated

XL*, High Vacuum Angle Valve, Air Operated

  • Light weight and compact
  • Uniform baking temperature
  • High fluorine resistance
  • Low outgassing
  • Little heavy metal contamination

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